FC 2704 — Storage

Section FC 2704: Storage

2704.1 General. Hazardous materials shall be stored in semiconductor fabrication facilities in accordance with this section and the provisions of other applicable chapters of this code. 2704.2 Fabrication areas. Hazardous materials shall be stored in accordance with FC 2704.2.1 through 2704.2.2.1. 2704.2.1 Location of HPM storage in fabrication areas. Storage of HPM in fabrication areas shall be within approved or listed storage cabinets, gas cabinets or within a workstation as follows: 1. Flammable and combustible liquid storage cabinets shall comply with the requirements of FC Chapter 57. 2. Hazardous materials storage cabinets shall comply with the requirements of FC 5003.8.7. 3. Gas cabinets shall comply with the requirements of FC 5003.8.6. Gas cabinets for highly toxic or toxic gases shall additionally comply with the requirements of FC 6004.1.2. 4. Exhausted enclosures shall comply with FC 5003.8.5. Exhausted enclosures for highly toxic or toxic gases shall also comply with FC 6004.1.3. 5. Workstations shall comply with the requirements of FC 2705.2.3. 2704.2.2 Maximum aggregate quantities in fabrication areas. The aggregate quantities of hazardous materials stored, handled and used in a single fabrication area shall be limited as specified in this section. Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by FC 5003.1.1, 5704.3.4 and 5704.3.5. FC Table 2704.2.2.1 Quantity Limits for Hazardous Materials in a Single Fabrication Area in Group H-5 a Hazard Category Solids (pounds / square foot) Liquids (gallons / square foot) Gas (SCF / square foot) Physical-Hazard Materials Combustible dust Note b Not Applicable Not Applicable Combustible fiber Loose Baled Note b Notes b, c Not Applicable Not Applicable Combustible liquid Class II Class IIIA Class IIIB Combination Class I, II and IIIA Not Applicable 0.01 0.02 Not Limited 0.04 Not Applicable Cryogenic gas Flammable Oxidizing Not Applicable Not Applicable Note d 1.25 Explosives Note b Note b Note b Flammable gas Gaseous Liquefied Not Applicable Not Applicable Note d Note d Flammable liquid Class IA Class IB Class IC Combination Class IA, IB and IC Combination Class I, II and IIIA Not Applicable 0.0025 0.025 0.025 0.025 0.04 Not Applicable Flammable solid 0.001 Not Applicable Not Applicable Organic peroxide Unclassified detonable Class I Class II Class III Class IV Class V Note b Note b 0.025 0.1 Not Limited Not Limited Not Applicable Not Applicable Oxidizing gas Gaseous Liquefied Combination of Gaseous and Liquefied Not Applicable Not Applicable 1.25 1.25 1.25 Oxidizer Class 4 Class 3 Class 2 Class 1 Combination oxidizer Class 1, 2, 3 Note b 0.003 0.003 0.003 0.003 Note b 0.03 0.03 0.03 0.03 Not Applicable Pyrophoric Note b 0.00125 Notes d and e Unstable reactive Class 4 Class 3 Class 2 Class 1 Note b 0.025 0.1 Not Limited Note b 0.0025 0.01 Not Limited Note b Note b Note b Not Limited Water reactive Class 3 Class 2 Class 1 Note b 0.25 Not Limited 0.00125 0.025 Not Limited Not Applicable Health-Hazard Materials Corrosives Not Limited Not Limited Not Limited Highly toxics Not Limited Not Limited Note d Toxics Not Limited Not Limited Note d For SI: 1 pound per square foot = 4.882 kg/m2, 1 gallon per square foot = 0.025 L/m2, 1 cubic foot = 0.02832 m3. a. Hazardous materials within piping shall not be included in the calculated quantities. b. Quantity of hazardous materials in a single fabrication area shall not exceed the maximum allowable quantities per control area in FC Tables 5003.1.1(1) and 5003.1.1(2). c. Densely packed baled cotton that complies with the packing requirements of ISO 8115 shall not be included in this material class. d. The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed 9,000 SCF. e. The aggregate quantity of pyrophoric gases in the building shall not exceed the amounts set forth in FC Table 5003.8.2. 2704.2.2.1 Storage and use in fabrication areas. The maximum quantities of hazardous materials stored in a single fabrication area shall not exceed the quantities set forth in FC Table 2704.2.2.1. 2704.3 Indoor storage outside of fabrication areas. The indoor storage of hazardous materials outside of fabrication areas shall be in accordance with FC 2704.3.1 through 2704.3.3. 2704.3.1 HPM storage. The indoor storage of HPM in quantities greater than those listed in FC 5003.1.1 and 5704.3.4 shall be in a room complying with the requirements of the construction codes, including the Building Code, and this code for a liquid storage room, HPM room or gas room as appropriate for the materials stored. 2704.3.2 Other hazardous materials storage. The indoor storage of other hazardous materials shall comply with the requirements of FC 5001, 5003 and 5004 and other applicable provisions of this code. 2704.3.3 Separation of incompatible hazardous materials. Incompatible hazardous materials in storage shall be separated from each other in accordance with FC 5003.9.8. 2704.4 Exit access corridors and exit enclosures. Hazardous materials shall not be stored in exit access corridors or exit access enclosures.